Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500137 | Multilayer mirror for reflecting EUV radiation and method for producing the same | Sergiy Yulin, Norbert Kaiser | 2022-11-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500137 | Multilayer mirror for reflecting EUV radiation and method for producing the same | Sergiy Yulin, Norbert Kaiser | 2022-11-15 |