Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11459229 | MMS, MMS array, MEMS actuator and method for providing an MMS | Peter Duerr, Detlef Kunze, Andreas Gehner | 2022-10-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11459229 | MMS, MMS array, MEMS actuator and method for providing an MMS | Peter Duerr, Detlef Kunze, Andreas Gehner | 2022-10-04 |