Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521825 | System and method for predicting stochastic-aware process window and yield and their use for process monitoring and control | — | 2022-12-06 |
| 11508546 | System and method for low-noise edge detection and its use for process monitoring and control | — | 2022-11-22 |
| 11380516 | System and method for generating and analyzing roughness measurements and their use for process monitoring and control | — | 2022-07-05 |
| 11361937 | System and method for generating and analyzing roughness measurements and their use for process monitoring and control | — | 2022-06-14 |
| 11355306 | System and method for generating and analyzing roughness measurements and their use for process monitoring and control | — | 2022-06-07 |