Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11529367 | Radiation damage protective agent | Yukimasa AOKI, Bunpei SATO, Ryosuke KUROKAWA | 2022-12-20 |
| 11366400 | Method of determining drop recipe, imprint apparatus, and article manufacturing method | — | 2022-06-21 |
| 11260577 | Imprint apparatus, planarized layer forming apparatus, forming apparatus, control method, and method of manufacturing article | — | 2022-03-01 |