Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11435378 | MEMS-based nanoindentation force sensor with electro-thermal tip heating | Felix Beyeler, Simon Muntwyler | 2022-09-06 |
| 11307125 | MEMS nanoindenter chip with indenter probe and reference probe | Simon Muntwyler, Felix Beyeler | 2022-04-19 |