Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387079 | Plasma etch chamber and method of plasma etching | Frantisek Balon, Ben Curtis | 2022-07-12 |
| 11380530 | Reactive sputtering with HIPIMS | Juergen Weichart, Stanislav Kadlec | 2022-07-05 |