Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476099 | Methods of and apparatus for magnetron sputtering | Hartmut Rohrmann, Claudiu Valentin Falub | 2022-10-18 |
| 11380520 | RF power delivery to vacuum plasma processing | Stefan Rhyner | 2022-07-05 |