Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538687 | Fluorine ion implantation system with non-tungsten materials and methods of using | Ying Tang, Sharad N. Yedave, Joseph D. Sweeney | 2022-12-27 |
| 11333302 | Adsorbent-based, mechanically-regulated gas storage and delivery vessel | Joseph D. Sweeney, Edward A. Sturm | 2022-05-17 |
| 11299802 | Germanium tetraflouride and hydrogen mixtures for an ion implantation system | Oleg Byl, Ying Tang, Joseph D. Sweeney, Sharad N. Yedave | 2022-04-12 |