Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532455 | Plasma generating apparatus and method for operating same | Sae-Hoon Uhm, Yeong-Hoon SOHN, Se-Hong Park | 2022-12-20 |
| 11521829 | Inductive coil structure and inductively coupled plasma generation system | Sae-Hoon Uhm | 2022-12-06 |