Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11524322 | Jig for attaching and detaching cleaning member | Tomoaki Fujimoto, Shuichi Suemasa | 2022-12-13 |
| 11501983 | Substrate cleaning member and substrate cleaning apparatus | — | 2022-11-15 |
| 11424138 | Substrate cleaning tool, substrate cleaning apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate cleaning tool | — | 2022-08-23 |