Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11251017 | Method for evaluating secondary optical system of electron beam inspection device | — | 2022-02-15 |
| 11217421 | Adjustment method and electron beam device | Ryo Tajima, Tatsuya Kohama, Kenji Watanabe, Tsutomu Karimata | 2022-01-04 |