Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11396082 | Substrate holding device and substrate processing apparatus including the same | — | 2022-07-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11396082 | Substrate holding device and substrate processing apparatus including the same | — | 2022-07-26 |