Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380561 | Cleaning device, substrate processing apparatus, maintenance method of cleaning device, and computer-readable recording medium including maintenance program of cleaning device | Hidetatsu Isokawa, Mitsuhiko Inaba | 2022-07-05 |
| 11358253 | Cleaning liquid supply device, cleaning unit, and storage medium storing program | Fujihiko Toyomasu | 2022-06-14 |