Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515210 | Wafer processing method and wafer processing apparatus | Kenya Kai | 2022-11-29 |
| 11393709 | Processing apparatus and workpiece processing method | Yukiyasu Masuda | 2022-07-19 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515210 | Wafer processing method and wafer processing apparatus | Kenya Kai | 2022-11-29 |
| 11393709 | Processing apparatus and workpiece processing method | Yukiyasu Masuda | 2022-07-19 |