Issued Patents 2022
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11534791 | Mist generator, film formation apparatus, and method of forming film using the film formation apparatus | Hiroyuki NISHINAKA, Masahiro Yoshimoto | 2022-12-27 |
| 11515146 | Method of forming gallium oxide film | Hiroyuki NISHINAKA, Masahiro Yoshimoto | 2022-11-29 |
| 11443944 | Method of growing semiconductor layers, method of manufacturing semiconductor device, and method of growing balk crystal | Hiroyuki NISHINAKA, Masahiro Yoshimoto, Daisuke Tahara | 2022-09-13 |
| 11424322 | Semiconductor device and method of manufacturing the same | Hiroyuki NISHINAKA, Masahiro Yoshimoto | 2022-08-23 |
| 11393902 | Semiconductor device | Yusuke Yamashita, Yasushi Urakami | 2022-07-19 |
| 11373864 | Method of forming oxide film, method of manufacturing semiconductor device, and apparatus configured to form oxide film | Hiroyuki NISHINAKA, Masahiro Yoshimoto | 2022-06-28 |
| 11371161 | Method of forming oxide film, method of manufacturing semiconductor device, and film forming apparatus configured to form oxide film | Hiroyuki NISHINAKA, Masahiro Yoshimoto | 2022-06-28 |
| 11280023 | Film formation apparatus and method of manufacturing semiconductor device | Hiroyuki NISHINAKA, Daisuke Tahara, Masahiro Yoshimoto | 2022-03-22 |
| 11270882 | Film formation apparatus configured to supply mist of a solution to surface of a substrate and method of manufacturing semiconductor device using the film formation apparatus | Hiroyuki NISHINAKA, Daisuke Tahara, Masahiro Yoshimoto | 2022-03-08 |