Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538718 | Method of producing semiconductor devices in a substrate including etching of the pattern of an etch mask and/or a reticle to create the first dicing lanes encircling the devices and second dicing lanes defined by fracture lines of the edges of the substrate | Mikael Colin | 2022-12-27 |
| 11459227 | Hinged microelectromechanical and/or nanoelectromechanical device with out-of-plane movement | Loic Joet | 2022-10-04 |
| 11312618 | Microdevice comprising at least two movable elements | Mikael Colin, Alain Jeanroy, Guillaume Lehee, Olivier Vancauwenberghe, Philippe Onfroy +1 more | 2022-04-26 |