Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11484893 | Coating head of mist coating film formation apparatus and maintenance method of same | — | 2022-11-01 |
| 11428652 | Pattern evaluation system and pattern evaluation method | Koichiro Irie, Ayumi DOI | 2022-08-30 |
| D957482 | Multi-functional polishing machine | — | 2022-07-12 |