Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495602 | Method and device for determining fabrication chamber | Zhenxing Li, Yuming Wang, Fang Wang, Chen Shen | 2022-11-08 |
| 11442440 | Method and apparatus of handling control wafer, method of testing by using control wafer | — | 2022-09-13 |