Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11282709 | Chemical agent for forming water repellent protective film and surface treatment method for wafers | Yuki FUKUI, Yoshiharu Terui, Shuhei Yamada, Yuzo OKUMURA, Saori SHIOTA +1 more | 2022-03-22 |