Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11441970 | Measurement apparatus for measuring a wavefront aberration of an imaging optical system | Albrecht Ehrmann, Helmut Haidner | 2022-09-13 |
| 11391643 | Method and device for calibrating a diffractive measuring structure | — | 2022-07-19 |