MR

Matthias Roesch

CG Carl Zeiss Smt Gmbh: 1 patents #29 of 139Top 25%
Overall (2022): #341,990 of 548,613Top 65%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11531272 Pupil stop for an illumination optical unit of a metrology system — 2022-12-20