Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11269260 | Method and assembly for characterizing a mask or a wafer for microlithography | Michael Carl | 2022-03-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11269260 | Method and assembly for characterizing a mask or a wafer for microlithography | Michael Carl | 2022-03-08 |