DH

Dirk Hellweg

CG Carl Zeiss Smt Gmbh: 2 patents #10 of 139Top 8%
Overall (2022): #164,547 of 548,613Top 30%
2
Patents 2022

Issued Patents 2022

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11460785 Method for the qualification of a mask for microlithography — 2022-10-04
11256178 Microlithographic mask, method for determining edge positions of the images of the structures of such a mask and system for carrying out such a method — 2022-02-22