Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11460780 | Method for adusting a first element of a lithography apparatus towards a second element of a lithography apparatus by a tunable spacer | — | 2022-10-04 |
| 11320749 | Actuator device for aligning an element, projection exposure apparatus for semiconductor lithography, and method for aligning an element | — | 2022-05-03 |