Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521845 | Lamp device, exposure apparatus, and method of manufacturing article | Hideki Matsumoto, Yasushi Sugiyama, Kohei Suzuki, Shunsuke Ota | 2022-12-06 |
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Yukihiro Yokota
Overall (2022): #189,900 of 548,613Top 35%
1
Patents 2022