Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11249394 | Imprint methods for forming a pattern of an imprint material on a substrate-side pattern region of a substrate by using a mold, and related device manufacturing methods | Yosuke Murakami, Noriyasu Hasegawa, Hirotoshi Torii, Yusuke Tanaka | 2022-02-15 |