Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11243462 | Lithography apparatus, method of forming pattern, and method of manufacturing article | Takuji Maruta, Ryo Nakamichi, Tomonori Tsukahara | 2022-02-08 |
HI
Hiroaki Itabashi
Overall (2022): #433,653 of 548,613Top 80%
1
Patents 2022