Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11472097 | Imprint apparatus, imprint method, and article manufacturing method | — | 2022-10-18 |
| 11442358 | Imprint apparatus, imprint method, and article manufacturing method | — | 2022-09-13 |
| 11392027 | Imprint apparatus, imprint method, and method for manufacturing article | — | 2022-07-19 |
| 11237487 | Imprint apparatus and article manufacturing method | — | 2022-02-01 |