Issued Patents 2022
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11535460 | Substrate processing apparatus | Christopher A. Bussiere | 2022-12-27 |
| 11414268 | Automated cryogenic storage system | Frank Hunt, Lingchen Sun, Julian Warhurst, Bruce S. Zandi, Anthony C. Bonora | 2022-08-16 |
| 11352220 | Semiconductor wafer handling and transport | — | 2022-06-07 |
| 11302564 | Substrate transport apparatus | Ulysses Gilchrist | 2022-04-12 |
| 11276598 | Substrate transport apparatus | — | 2022-03-15 |
| 11273558 | Substrate transport apparatus | — | 2022-03-15 |
| 11267649 | Cryogenic freezer | Frank Hunt, Lingchen Sun, Julian Warhurst, Bruce S. Zandi, Jeffrey S. Brooks | 2022-03-08 |
| 11251059 | Method and apparatus for substrate transport apparatus position compensation | Jairo T. Moura, Bing Yin, Nathan Spiker, Vincent W. Tsang | 2022-02-15 |