Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11371146 | Gas distribution unit in connection with ALD reactor | — | 2022-06-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11371146 | Gas distribution unit in connection with ALD reactor | — | 2022-06-28 |