Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11480885 | Apparatus for and method cleaning a support inside a lithography apparatus | James H. Walsh, Christopher Rossi Vann | 2022-10-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11480885 | Apparatus for and method cleaning a support inside a lithography apparatus | James H. Walsh, Christopher Rossi Vann | 2022-10-25 |