Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454938 | Control system, method to increase a bandwidth of a control system, and lithographic apparatus | Marcel François Heertjes, Daniel Andreas Deenen, Natalia Irigoyen Perdiguero | 2022-09-27 |