TG

Tian Gang

CG Carl Zeiss Smt Gmbh: 1 patents #29 of 139Top 25%
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1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11327403 Illumination optical system for projection lithography Jan Bernard Plechelmus Van Schoot 2022-05-10