Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454892 | Fluid handling structure for lithographic apparatus | Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more | 2022-09-27 |
| RE49142 | Lithographic apparatus and an object positioning system | Adrianus Hendrik Koevoets, Christianus Wilhelmus Johannes Berendsen, Jim Vincent Overkamp, Patricius Jacobus Neefs, Putra SAPUTRA +4 more | 2022-07-19 |