Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531274 | Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets | Maria Isabel De La Fuente Valentin, Martijn Jongen, Giulio BOTTEGAL, Thomai Zacharopoulou | 2022-12-20 |
| 11506566 | Method of processing data, method of obtaining calibration data | Maria Isabel De La Fuente Valentin, Satej Subhash KHEDEKAR, Bert Verstraeten, Bastiaan Onne Fagginer Auer | 2022-11-22 |