Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11314172 | Instant tuning method for accelerating resist and etch model calibration | Hongfei SHI, Pengcheng YANG, Lei Wang, Mu FENG | 2022-04-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11314172 | Instant tuning method for accelerating resist and etch model calibration | Hongfei SHI, Pengcheng YANG, Lei Wang, Mu FENG | 2022-04-26 |