Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11269259 | Lithographic apparatus and a device manufacturing method | Thomas POIESZ, Bert Dirk SCHOLTEN, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Laura Maria Fernandez Diaz +3 more | 2022-03-08 |