Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11221560 | Method and apparatus for design of a metrology target | Wei-Cheng Liu, Maurits Van Der Schaar | 2022-01-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11221560 | Method and apparatus for design of a metrology target | Wei-Cheng Liu, Maurits Van Der Schaar | 2022-01-11 |