Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11347155 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Petrus Wilhelmus SMORENBURG, Gerrit Jacobus Hendrik Brussaard | 2022-05-31 |
| 11223181 | High harmonic generation radiation source | Petrus Wilhelmus SMORENBURG, Gerrit Jacobus Hendrik Brussaard | 2022-01-11 |