Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500297 | Anti-rotation coupling | Jon David Tedrow, Colin Michael Odneal | 2022-11-15 |
| 11215933 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Matheus Anna Karel Van Lierop, Samuel Bertrand Dominique David | 2022-01-04 |