Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11307507 | Method to obtain a height map of a substrate having alignment marks, substrate alignment measuring apparatus and lithographic apparatus | Arjan Hölscher, Alex Pascal Ten Brink, Petrus Franciscus Van Gils | 2022-04-19 |