Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500298 | Reticle sub-field thermal control | Eric Justin MONKMAN, Michael Andrew Chieda, Stephen Roux | 2022-11-15 |
| 11333984 | Apparatus for and method of in-situ particle removal in a lithography apparatus | Richard Joseph Bruls, Ronald Peter Albright, Peter Kochersperger | 2022-05-17 |