Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11396702 | Gas supply unit and substrate processing apparatus including the gas supply unit | Young-Hoon Kim, Dae Youn Kim, Hyun Soo Jang, Jeong Ho Lee | 2022-07-26 |
| 11222772 | Substrate processing apparatus | Young-Hoon Kim, Dae Youn Kim, Hyun Soo Jang, Jeong Ho Lee | 2022-01-11 |