Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482412 | Method for depositing a gap-fill layer by plasma-assisted deposition | — | 2022-10-25 |
| 11289326 | Method for reforming amorphous carbon polymer film | — | 2022-03-29 |
| 11282698 | Method of forming topology-controlled amorphous carbon polymer film | — | 2022-03-22 |
| 11251035 | Method of forming a structure on a substrate | David Kurt de Roest | 2022-02-15 |