Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11390945 | Temperature control assembly for substrate processing apparatus and method of using same | Heechul Jung, YonJong Jeon | 2022-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11390945 | Temperature control assembly for substrate processing apparatus and method of using same | Heechul Jung, YonJong Jeon | 2022-07-19 |