Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11414760 | Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the same | KiChul Um, DooHan Kim, YongGyu Han | 2022-08-16 |
| 11274369 | Thin film deposition method | KiChul Um, DooHan Kim, YongGyu Han, TaeHee Yoo, WanGyu Lim +1 more | 2022-03-15 |