Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11359302 | Susceptor having CF coating | — | 2022-06-14 |
| 11339476 | Substrate processing device having connection plates, substrate processing method | Naoto Tsuji, Miho Shimotori, Makoto Igarashi | 2022-05-24 |