Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11533783 | Multi-zone heater model-based control in semiconductor manufacturing | Mauro Cimino, Don Channa Kaluarachchi, Ramyashree Vishnuprasad, Dmitry Lubomirsky | 2022-12-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11533783 | Multi-zone heater model-based control in semiconductor manufacturing | Mauro Cimino, Don Channa Kaluarachchi, Ramyashree Vishnuprasad, Dmitry Lubomirsky | 2022-12-20 |