Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11348813 | Correcting component failures in ion implant semiconductor manufacturing tool | Tianqing Liao, Harikrishnan Rajagopal | 2022-05-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11348813 | Correcting component failures in ion implant semiconductor manufacturing tool | Tianqing Liao, Harikrishnan Rajagopal | 2022-05-31 |