Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450504 | GeH4/Ar plasma chemistry for ion implant productivity enhancement | Bon-Woong Koo, Ajdin Sarajlic, Ronald F. Johnson, Peter Ewing, Mervyn Deegan | 2022-09-20 |
| 11424097 | Ion source with tubular cathode | Bon-Woong Koo, Svetlana B. Radovanov, Frank Sinclair, You Chia Li, Peter Ewing +2 more | 2022-08-23 |